Mks Astron 2l Manual 👑

High dissociation rates (>94%) up to 2.5–3.0 slm of NF₃. Gas Requirements

is a potent greenhouse gas and potentially hazardous. High dissociation rates (>94–95%) in the Astron unit help minimize environmental impact by converting it into reactive radicals that are easily scrubbed. mks astron 2l manual

: Typically requires 100% Argon (Ar) for plasma ignition. After ignition is stabilized (1 to 4 Torr), the process gas (NF3) is introduced and the Argon can be removed. High dissociation rates (>94%) up to 2

The plasma tube can remain hot long after operation. : Typically requires 100% Argon (Ar) for plasma ignition

: Supports up to 3.0 slm (standard liters per minute) of NF3cap N cap F sub 3 process gas post-ignition.

), which then reacts with chamber wall deposits to form easily scrubbed gases.

Follow these steps to safely integrate the MKS Astron 2L into your system architecture. Step 1: Unpacking and Inspection